| 摘要 |
PURPOSE:To reduce the size of an optical lighting device and to improve the resolving performance of a reducing projection exposure device by uniforming the light intensity distribution on the incident pupil surface of a reducing projection lens easily by an integrator of simple constitution. CONSTITUTION:The fiber type integrator 19 consists of a mirror 20 which is cylindrical and has a reflecting surfaces as its internal surface, two optical fiber bundles 21 and 22 which are inserted into both internal surface end parts of the mirror 20 at an interval l and have fiber bundles 21a and 22a inserted into them, an output lens 23, and a wavelength filter 15. Then, the light source composed of a ultra-high voltage mercury vapor lamp 1 is placed at one focus P1 of an elliptic mirror 2 as usual, but the other focus P2 is set on the incidence surface of the 1st optical fiber bundle 21 and an image of the projection surface S1 of the 2nd optical fiber bundle 22 is formed at a position S2 on the surface of the incident pupil 10 of the reducing projection lens 9 through a condenser lens 9. Light projected from one optional point of the 1st optical fiber bundle 21 illuminates the entire incidence surface of the 2nd optical fiber bundle 22 uniformly and unevenness in the light intensity distribution at the other focus P2 is eliminated on the projection surface S1 of the 2nd optical fiber bundle 22. |
