| 摘要 |
PURPOSE:To easily form a membrane from an uneven specimen, by embedding an observing specimen having an uneven minute shape in a curable material having a sputtering speed equal to or slower than that of the specimen and adjusting said specimen to a predetermined thickness by sputtering. CONSTITUTION:A double-coated tape 5 is adhered to the end of an easily soluble substrate to fix an uneven minute specimen 2 and a ceramic type resin 6 is subsequently applied onto said specimen as an embedding material and the other substrate 4 is further placed thereon to hold the resin 6 and the specimen 2 between both substrates 4 to cure the resin. Thereafter, both substrates 4 are removed by water being a solvent to leave a thin piece 7 wherein the specimen 2 was embedded in the ceramic type resin 6 with a thickness of about several ten mum. After the thin piece 7 is cut so as to have an area to be observed at the center, the cut piece is ground by an ion impact method. The Ar-ion 3 accelerated at this time irradiates the central region with a diameter of about 1mmphi of the thin piece 7 but, because a received part is reinforced, the detachment of a protruded part is prevented and the thin piece 7 becomes thin from the almost center thereof to obtain an observing specimen having a desired thickness.
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