| 摘要 |
PURPOSE:To make possible the easy evaluation of a resist with high accuracy by immersing the 1st electrode and the 2nd electrode which consists of a material different from the material of the 1st electrode and on which the resist is coated into a liquid which dissolves the resist, measuring the slight current flowing between the two electrodes and comparing the same with a preset standard current value. CONSTITUTION:A fixed resistor 5 of, for example, 10kOMEGA is connected in series between the 1st electrode 3 and the 2nd electrode 4 and the voltage at both terminals of the resistor 5 is measured by a voltmeter 6. Since the resistor is fixed, the display of the voltage measured by the voltmeter 6 indicates straightly the magnitude of the current flowing in the resistor 5. The voltage generated by the current flowing in the resistor 5 is amplified by an amplifier 7 and is converted to a digital signal by an A/D converter 8. The digital signal is inputted to a processor 9 and is stored into a memory 10. On the other hand, the voltage value of the preset standard sample is stored in a memory 11. The voltage value between the 1st electrode 3 and the 2nd electrode 4 is sampled at every prescribed time and is compared with the voltage value of the standard sample by the processor 9. |
