| 摘要 |
PURPOSE:To give necessary electric characteristics to an electrophotographic sensitive body by forming an amorphous carbon (a-C) layer having an energy gap of 2.0-3.2eV as the surface layer on a buffer layer formed on the sensitive body having an a-Si type photosensitive layer. CONSTITUTION:A 0.2mum thick blocking layer 2 and the 2.5mum thick photoconductive layer 3 are deposited on a degreased Al cylindrical substrate 1 by using SiH4 and B2H6 as source gases, and the 0.1mum thick buffer layer 4 is formed on the layer 3 by using source gases of SiH4, CH4, and B2H6, and finally, the 0.1mum thick surface layer 5 made of a-C(H) is deposited on the layer 4 with a source gas of C3H8. The energy gap of the layer 3 is 1.8eV, that of the layer 4 is 2.1eV, and that of the layer 5 is 2.7eV. This photosensitive body is fixed to the ordinary Carlson system copying machine, and 100,000 sheets of copies have been made, resulting in obtaining extremely sharp images, and sharp images even under a relative humidity of 85% at 35 deg.C. |
