| 摘要 |
PURPOSE:To measure the thickness of a polymer film and the thickness of the magnetic material applied to both surfaces of said polymer film, by placing a metal under a magnetic material specimen applied to both surfaces of the polymer film and measuring the intensity of fluorescent X-rays generated from the magnetic material and that of fluorescent X-rays generated from a substrate metal. CONSTITUTION:Primary X-rays emitted from an X-ray tube 1 are converged by a collimator 2 and allowed to irradiate the magnetic material specimen 4 and substrate metal 5 on a specimen stand 6. The intensities of fluorescent X-rays 7 generated from both of them 4, 5 are detected by an X-ray detector 8 and the electric signal thereof is amplified by a preamplifier 9 and a linear amplifier 10 and the peak thereof is discriminated by a peak discriminator 11. The intensities of fluorescent X-rays respectively generated from the magnetic material specimen 4 and the substrate metal 5 are inputted to CPU 12 and the thicknesses of both of them 4, 5 are operated from X-ray intensity data by CPU 12 to be outputted to a display part 13. |
