| 摘要 |
PURPOSE:To make it feasible to process a workpiece without any manpower by fitting an information medium to the workpiece and giving instructions for the processing and transfer thereof and collecting the information of a processing result, respectively through the said medium. CONSTITUTION:In a wafer production stage, for example, in a semiconductor factory, a calculator 2 writes in the information medium 11A of a wafer cassette 12A, a processing flow and the contents thereof for one workpiece 1A, together with its manufacturing number at a primary work stage, through wafer feed stages 31 and 41 of information medium controllers 31-3i and transmitting/ receiving antennae 41-4j. Then, a workpiece 1A is transferred and a diffusion reactor controlling device 51 reads in necessary processing conditions via a transmitting/receiving antenna 42 at the inlet of the diffusion reactor and the controller 32. After the completion of processing, actual data are written in the information medium 11A through an inversed order. This function is done by every processing machine control device 52-5k and the information thereof is sent to a calculator 2 for production control. Consequently, the follow-up of workpiece can be done properly without any manpower and automated, thereby improving the workpiece quality. |
