| 摘要 |
PURPOSE:To reduce the number of lens systems as far as possible and to ease the problem in humidity control by using a reflecting mirror having at least one torus curved faces to the optical system and shaping the luminous flux of laser light. CONSTITUTION:The torus curved face mirror 10 is disposed in the optical path of the laser light 4 released horizontally from a laser oscillator 1 at the angle at which the optical path is changed approximately perpendicularly in the horizontal direction. A reflecting mirror 3 which is a plane mirror is disposed on the optical path past the mirror 10 at the angle at which the optical path is changed to a mask 7. The shaping of the laser light 4 is made possible by the above-mentioned constitution as the beam widths in the directions (a) and (b) in the figure are respectively absorbed by the two curvatures A, B of the mirror 10. The stable laser beam processing is thus made possible. |
