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发明名称
WASHER
摘要
申请公布号
JPS61249581(A)
申请公布日期
1986.11.06
申请号
JP19850090997
申请日期
1985.04.30
申请人
HOYA CORP
发明人
ISHIBASHI MASARU;KATO KUNIHIRO
分类号
B08B3/02;B08B11/02;G03F1/00;G03F1/82;H01L21/30;H01L21/304
主分类号
B08B3/02
代理机构
代理人
主权项
地址
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