| 发明名称 |
QUARTZ TUBE FOR THERMAL PROCESSING OF SEMICONDUCTOR SUBSTRATES |
| 摘要 |
<p>A holder 1 within which semiconductor substrates may be held during thermal processing comprises a double layered tube having an inner layer 3 formed of a transparent fused quartz tube and an outer layer 4 fused to it and formed of a sintered crystalline quartz layer. Transparent fused quartz end tubes 6 and 7 may be fused to the ends of the double layered tube.</p> |
| 申请公布号 |
EP0046355(B1) |
申请公布日期 |
1986.11.05 |
| 申请号 |
EP19810303610 |
申请日期 |
1981.08.06 |
| 申请人 |
FUJITSU LIMITED |
发明人 |
KAWASE, NOBUO;AIGO, MASAYOSHI |
| 分类号 |
B32B9/04;B01J12/00;C03B19/04;C03B19/06;C30B25/08;C30B31/10;C30B33/00;H01L21/205;(IPC1-7):C30B31/10 |
主分类号 |
B32B9/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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