| 摘要 |
PURPOSE:To achieve high discharging speed under transient state by functioning the centrifugal compression pump stage arranged at the suction port side as a centrifugal compressor under transient condition while as Siegbahn molecular pump under normal condition. CONSTITUTION:A centrifugal compression pump stage 13 and a circumferential flow compression pump stage 14 are arranged sequentially in a housing 11 between a suction port 11A side and the discharge port 11B side. Under transient condition at initial operating stage of pump, said stage 13 will function as a centrifugal compressor. under steady state, the gas flow at the inlet of the centrifugal compression pump stage 18 will be an intermediate flow and the centrifugal compression pump stage 13 will function as Siegbahn molecular pump. Consequently, high discharge speed can be achieved under transient state at the initial operating stage.
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