| 摘要 |
PURPOSE:To make the thickness of a film formed on the surface of a substrate uniform by a method wherein laser beams are applied from both sides of the provided substrate when the film is formed on the surface of the substrate. CONSTITUTION:Laser beams from laser sources 12 and 13 provided outside a reaction container 1 are projected through light projection windows 10 and 11 respectively so that the laser beams are projected in parallel to the surface of a substrate 6 from both sides of the substrate 6. With this constitution, a substrate with a uniform film thickness distribution can be manufactured. |
