| 摘要 |
PURPOSE:To improve resolution by providing a transparent protector of layer or plate form, providing a slit part between neighboring photodetecting elements and light-transmitting windows in the direction of thickness from the element- side, and thereby cutting off reflecting light. CONSTITUTION:A transparent electrode 12 is formed by patterning by means of etching after forming a film by means of electronic-beam vapor-depositing or spattering at a temperature <=300 deg.C at which such as ITO, SnO2, etc. of an amorphous this film semiconductor does not deteriorate. In order to separate a couple of light-transmitting parts 10 and photodetecting elements 13 from unnecessary reflecting light from a reader part, the transparent protector 15 that has the slit 14 is provided with an intermediation by a transparent adhering layer 16 in a manner that the slit 14 is located at a boundary of the photodetecting elements. For the material of the protector 15, a thin bro-silicated glass, light-transmitting seramics which are non-organic materials, or polymeric materials such as transparent epoxy resin, transparent silicon resin etc. can be used.
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