| 摘要 |
PURPOSE:To make it possible to prevent pattern aberration caused by the yawing of the stage, by mounting the square for length measurement applying the laser interferometer on the theta-stage. CONSTITUTION:The theta-table 42 which mounts the original sheet or the body to be exposed and can rotate in the specified plane, the XY-table 44 which loads the theta-table and can travel in the direction parallel to the specified plane, and the laser interferometers 61-63 which measure the travel distance of the original sheet or the body to be exposed as the result of travel of the XY-table are installed. In this exposure equipment, the square (mirror in the form of L) 43 is mounted on the theta-table 42. The yawing angle theta can be obtained from the indications of the laser interferometers 61 and 62 and the distance between them. Therefore, by rotating the theta-table so as to compensate the yawing angle thetaafter the step shift and, if necessary, by compensating the position in the direction of XY by moving the XY-table, it is possible to fix the position of the substrate stage 4 with high precision. |
