| 摘要 |
<p>PURPOSE:To mechanically draw symbols for management and identification at part of a mask substrate without contact by connecting an optical fiber cable with a light source, and disposing the light output of the cable horizontally movably with respect to the substrate. CONSTITUTION:An optical fiber cable is connected with a light source 1 of a name printer for drawing symbols or a pattern for managing or identifying a photomask by emitting a light to part of a photosensing agent 5a coated on the surface of a mask substrate 5 to photosense it, and the light output of the cable 2 is disposed horizontally movably with respect to the substrate 5. For example, a magnetic metal piece 3 is mounted at the output 2b of the cable 2, four pole deflectors 4,... are disposed around the piece 3 in four directions, magnetic fields of different intensities in response to the desired character generated from the deflectors 4 are acted on the piece 3 of the cable 2, the output 2b is moved horizontally to the substrate 5 on a stage 6 to partly expose the agent 5a on the substrate 5 with the symbols.</p> |
