| 摘要 |
PURPOSE:To form the titled highly efficient head by forming the upper insulating layer out of a photosensitive polyimide resin, separating the layer into plural layers, forming each layer while changing the heating conditions before exposition and exposing and developing each layer. CONSTITUTION:The lower magnetic substance 2 is formed in 2mum thickness on a substrate 1, a gap 3 is formed in 0.8mum thickness, the lower insulating layer 4 is formed in 2mum thickness and then a conductor coil 5 is formed in 2mum thickness. Then the first photosensitive polyimide 6 is coated in 5mum thickness with a resist spinner and baked at 80 deg.C for 40min. The second photosensitive polyimide 7 is further coated in 2mum thickness with a resist spinner, baked at 80 deg.C for 40min and exposed with a mask 8 and light 9 for exposure. Subsequently, the first and the second polyimides 6 and 7 are simultaneously developed to form the upper insulating layer 10. The upper magnetic substance 11 is further formed in 2mum thickness to prepare a thin film magnetic head.
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