| 摘要 |
PURPOSE:To enable the inspection of the deformation of a pattern in all directions, by applying an irradiation light in scanning manner to an object to be inspected, such as lead pins of IC, which has the same continuous pattern. CONSTITUTION:When a laser beam is made to fall on an end part of a lead pin array 12a, the beam reflected therefrom is made to fall on a photoelectric transducing element 16. In the case when the form of each lead pin is normal, a pulse signal is obtained at a fixed interval and with fixed intensity from the element 16 by the scan of the laser beam by means of a mirror 10a of an optical scanner 10. In the case when the lead pin is bent in the perpendicular direction to the pin array 12a, however, the intensity of an output pulse of the element 16 corresponding to the bent part lowers. In the case when the lead pin is bent in the direction along the pin array 12a, on the other hand, the width of the output pulse of the element 16 is varied. By measuring the number or the interval of the output pulse of the element 16, accordingly, the deformation of the lead pin in all directions can be inspected. |
