| 摘要 |
PURPOSE:To obtain a small and light multistage vacuum pump with low vibration and noise by arranging a plurality of diaphrams at equal interval positions on the periphery centering a driving axis and operating these diaphrams by a single eccentric cam provided on the driving axis. CONSTITUTION:A plurality of diaphrams 18 of a vacuum pump are provided at equal interval positions on the periphery centering a single driving axis 31 in order to put out vibration. A single eccentric cam 21 is fixed on the driving axis 31, and a ring 23 is arranged through a bearing 22 on the outer periphery of the eccentric cam 21. And, rods 20 of the respective diaphrams 18 are lockingly engaged to oscillate freely by pins 24 provided at equal interval positions on the periphery of the ring 23, and the respective diaphrams 18 are so arranged as to be moved reciprocally in order by the eccentric cam 21.
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