| 摘要 |
PURPOSE:To prevent effect of natural vibration to a position control by removing items relating to natural vibration frequency in a loop transfer function of a control system. CONSTITUTION:An inverted characteristic of a natural vibration characteristic for respective natural vibrations is determined by adjusting a coefficient of a state vibration type filter 7. A deviation signal between a sensed signal and a set signal is applied to a control adjusting unit 1 through the inverted characteristic filters connected in series. Then, a vibration control loop including a plurality of low transition filters which receive the deviation signal or the sensed signal and a phase lead circuit can remove a frequency band range which has transmitted the frequency of the respective inverted characteristic filters a prescribed amount. As a result, the natural vibration does not make an effect on a position control. |
