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发明名称
MASK HOUSING TOOL
摘要
申请公布号
JPS61244770(A)
申请公布日期
1986.10.31
申请号
JP19850086578
申请日期
1985.04.24
申请人
MITSUBISHI ELECTRIC CORP
发明人
NISHIHATA MIKIO;HOSHIKA HARUYUKI
分类号
H01L21/30;B65D83/04;G03F1/00;G03F1/66;G03F7/20;H01L21/027
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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