发明名称 AUTOMATIC WORKPIECE TRANSFER DEVICE
摘要 PURPOSE:To shorten a relay stage passage time for preventing a workpiece from the stain and damage by inserting an auto-hand into a cassette to press the front edge of a workpiece with a pusher, clamping and transferring the workpiece after correcting the position of workpiece with both side guide grooves and inner stays. CONSTITUTION:An autohand 22 is brought on a glass base plate 50 in a cassette 47 and the base plate 50 is vacuum adsorbed to move onto a transfer stage 4 and lower a support plate 25 so that the adsorption is released to place the base plate 50 on four cursors 6, 8, 10, 13 on a stage 4. Here, respective sides of the base plate 50 are placed on reference pins 7a, 7b, 9 on the cursor at intervals DELTAX, DELTAY and a lift plate is lifted by a cylinder. A pawl member is disengaged from the front edge of the base plate 50 to locate the base plate 50 without any troubles. Next, sliders 11 and 14 on the cursors 10 and 13 are operated in the direction of arrow to press two orthogonal sides of the base plate 50.. against the reference pins 7a, 7b, 9 for location, adsorption and fixation. Thus, a relay stage can be omitted to eliminate any stain and damage of workpieces.
申请公布号 JPS61243742(A) 申请公布日期 1986.10.30
申请号 JP19850081396 申请日期 1985.04.18
申请人 CANON INC 发明人 KATSUTA HIROO
分类号 B65H1/28;B65G1/00;B65G1/07;B65H3/08;H01L21/67;H01L21/677;H01L21/68 主分类号 B65H1/28
代理机构 代理人
主权项
地址