| 摘要 |
PURPOSE:To contrive longer life of a thermal head, by making the outer surface of a protective film covering a heating resistor extremely flat in a thermal head. CONSTITUTION:In a glaze layer 2 formed on the upper surface of a substrate 1, a concave portion of a given pattern is provided and a lead wire 4 is buried therein. The end of the lead wire 4 is exposed on the upper surface of the glaze layer 2 and is electronically connected to a heating resistor 3. On the upper surface of a substrate 1 made of ceramics, the glaze layer 2 approximate 40-80mu meter thick is formed. Photolithographic etching is applied to the glaze layer 2 to form a concave portion 21 having a pattern of a given lead wire. In the concave portion formed by etching, the lead wire 4 is filmed by vapor deposition or electroless deposition. After a resist 14 is removed, the heating resistor 3 is formed by sputtering. Finally, an oxidation-inhibitting protective film 51 made of silicon dioxide 1-2mum thick is formed and on the upper surface thereof a wear resistant protective film 52 approximate 2mum thick is further formed. |
