| 摘要 |
A surface acoustic wave device comprises a piezoelectric beam 11 attached to one end to a rigid support 10 by a patch of adhesive 12. The unsupported end of the beam is spaced from the support member by a distance equal to the thickness of the adhesive patch, eg 16 ???. Flexural resonances in the unsupported end of the beam are viscous-air-damped by virtue of the close spacing between the beam and the support member. The upper surface of the beam is provided with electrode patterns 13a-d to create the SAW device, e.g. a frequency filter, a resonator or an accelerometer. <IMAGE> |
