| 摘要 |
PURPOSE:To produce a magnetic head having high accuracy and high efficiency by etching away a protective film of a rgion including a pattern for checking a cutting part and polishing position from a substrate formed thereon with magnetic poles, conductive coils and insulating layer prior to cutting of the substrate. CONSTITUTION:The lower protective film 2, the magnetic poles 3-6, the conductive coils 9, 10 and the insulating layer 11 are formed on the substrate 1 and after the upper protective film 8 is formed thereon, the substrate is cut and polished. The protective film 8 of the region including the pattern 13 for checking the cutting part and polishing position is preliminarily removed by etching prior to the cutting of the substrate, then a grinding wheel 12 and the film 8 do not contact with each other in the stage of cutting the substrate and therefore the exertion of the impact and distortion to the protective film is obviated. The high-speed cutting of the substrate is thus made possible and the reduction of area in each working stage is exactly known from the exposed check pattern 13. The control of the gap depth is thus made easy. |
