| 摘要 |
PURPOSE:To improve the precision of printing by bringing a mask into contact with a photosensitive substrate securely. CONSTITUTION:The photosensitive substrate 14 is placed on a table 12. A head 13 is provided above the table 12 and a cylinder 18 and a piston 20 are provided therein to moves up and down a mask elevation member (external frame) 31. An intermediate frame 32 and a mask holder support frame 33 are provided in the external frame 31. A mask holder 23 is provided further inside to hold the mask 22. Then, the mask 22 is moved up and down to and from the photosensitive substrate 14 to perform contact printing. In this case, bearings 35 and 36 which are mutually orthogonal are provided between the external frame 31 and intermediate frame 32, and intermediate frame 32 and mask holder support frame 33 and rotated when the mask holder 33 is lowered, so that the mask contacts the photosensitive substrate 14. Thus, the mask is brought into contact with the photosensitive substrate securely, so the pattern of the mask is printed on the substrate with high precision. |
