| 摘要 |
PURPOSE:To obtain a probe where unnecessary coupling vibrating mode does not appear by forming a slot having a depth >=1/2 of the thickness on a face of an ultrasonic wave irradiating face of each vibrator element, packing a packing member to a gap in the slot and between the elements and providing an earth electrode between the acoustic matching layer and the element. CONSTITUTION:A metallic thin film is formed on both faces of a plate made of a piezoelectric material. Then a high voltage is impressed between both metallic thin films so as to polarize th plate made of the piezoelectric material. Then from the upper face of the rear plate to the packing member 12 is cut by machining. Then from the upper face of the split vibrator element 11 to the depth (d) being >=1/2 of th thickness (t) is cut by machining so as to form a slot 17. Further, the gap between the slot 17 formed on the vibrator element 11 and each vibrator element 11 is packed by a packing member 16, the upper face of the packing member 16 and the electrode 11a face on the vibrator element 11 are formed with the earth electrode 14 over a prescribed range and the acoustic matching layer 13 is bonded to the earth electrode 14. |
