| 摘要 |
PURPOSE:To permit to install a clean air supplying means in a building having low ceiling height and simplify duct work for air conditioning by a method wherein the distributing means of air, supplied from the outside of the clean working chamber, is accommodated in the clean air supplying means. CONSTITUTION:The air-conditioning duct 16 or the distributing means of air- conditioning air supplied from the outside of the clean working chamber, a partitioning plate 17, partitioning contaminated-air side and clean-air side, and illuminating lamps 18 for paths are provided between the blow-off port 9 of clean air for the paths and a ceiling plate 3 while a lattice type light diffusing plate 19 for the paths is provided below the lamps 18. The air-conditioning duct 16 is connected to a main air-conditioning duct, provided in the outside of the clean working chamber, at the end surface in the lengthwise direction of the same chamber. The air-conditioning duct 16 is provided with an opening 16a at the side surface thereof and distributes the air-conditioning air to respective fans 10 accommodated in the ceiling of the clean working chamber. Thus, an interval between the ceiling 22 of the building and the ceiling plate 3 can be set at the minimum dimension necessary for the assembling work while the space may be utilized effectively in such manner. |
