| 摘要 |
<p>The scanning acoustic microscope comprises a solid lens body (1) consisting of two sections (2, 5) of materials having different sound propagation characteristics but matching acoustic impedances. A lens (4) is arranged at the interface (3) of said sections (2, 5) having its focal point falling into the apex (8) of a sharply pointed tip (7) formed at the free surface of one (5) of the sections. Tip (7) and specimen (10) to be investigated are immersed in a coupling medium (9) having a relatively high absorption coefficient. The lens body (1) carries a transducer (11) on its surface (6) opposite the tip (7) for sending plane sound waves through said lens (4) and said tip (7) onto the specimen (10). The reflected and transmitted waves are received by the transducer (11) attached to the lens body (1) and a transducer (21) arranged on the rear side of the specimen, respectively. By appropriate processing of their output signals, high-resolution (10 nm) images of the specimen (10) can be obtained. </p> |
