| 摘要 |
<p>A field effect semiconductor device which utilizes a two-dimensional electron gas is composed of a semi-insulating substrate (1 an i-type active layer (2); a superlattice structure layer which comprises a first i-type thin layer (3A), a thin layer (3B) doped with dopant by an atomic plane doping process, and a second i-type thin layer (3C), these thin layers forming a quantum well; generally an n-type layer; and electrodes (6, 7, 8) for source, drain, and gate.</p> |
