| 摘要 |
PURPOSE:To produce the ultrafine particles of a compd. free from a by-product by feeding forcedly gas to the reaction region of both the gas and vapor, increasing the reaction efficiency of both and evaporating a material in the inside of the low-pressure reactive gas to make it the ultrafine particles of the compd. CONSTITUTION:After a vacuum pump 6 is turned on and a vacuum valve 7 is opened and the inside of a vacuum vessel 1 is made to about 10<-6>Torr vacuum, the vacuum valve 7 is closed. A gas introducing valve 9 is opened to introduce O2 until the inside of the vessel 1 is made to about 1Torr and thereafter the valve 9 is closed. When an electric power source 3 is turned on and a boat 4 is electrically conducted and Sn is started to be evaporated with the heating thereof, O2 is consumed and the pressure of the inside of the vessel 1 is decreased. While monitoring this pressure with a vacuum gage 10, the divergence of the valve 9 is regulated and the flow rate of O2 is controlled so that the pressure is kept in 1Torr and O2 is directly fed just above Sn material through the injection port 81 of a gas introducing pipe 8.
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