| 摘要 |
PURPOSE:To produce hexagonal ferrite having smaller coercive force than single-phase barium ferrite at a low temp. of <=350 deg.C by passing a gaseous reactant in plasma and utilizing the activity of the plasma. CONSTITUTION:Gaseous argon 20 for bubbling is passed through bubblers 16, 17, 18 and 19 respectively contg. 30% solns. of diethoxy iron Fe(O.C2H5)3, diethoxy barium Ba(O.C2H5)2, diethoxy cobalt Co(O.C2H5)3 and diethoxy titanium Ti(O.C2H5)4 in alcohol (C2H5OH) respectively at 200cc/min, 50cc/min, 10cc/min and 10cc/min flow rate. The vapors are introduced onto a polyimide substrate 15 heated at 345 deg.C in a reaction chamber 11 whose pressure is reduced by a rotary pump 22. The oxygen 21 which is also a gaseous reactant is introduced onto the polyimide substrate 15 at 200cc/min flow rate. The gaseous pressure at this time is regulated to 10Torr. The high-frequency electric power (13.56MHz) is impressed at 500W (5W/cm<2>) for 60min to carry out the reaction.
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