| 摘要 |
PURPOSE:To obtain a microlens having high condensing power and high reliability with a simple process by coating and forming a plasma-polymerized polymer film on the microlens consisting of a thermoplastic resin. CONSTITUTION:A microlens body 2 is formed by using the thermoplastic resin and thereafter a thin film 3 of the plasma-polymerized polymer by plasma polymn. is formed over the entire surface thereof. A bell-jar type device is used as a polymn. device in the formation of the thin film by the plasma polymn. and if an outside electrode type of the device is used, the thin film of the plasma-polymerized film is formed by exciting strongly an inert gas such as argon, introducing a monomer (for example, styrene, methyl methacrylate, etc.) to the down stream of the discharge gas to excite the gas and progressing the polymn. reaction of the monomer to radical and ion. The plasma-polymerized polymer film is the film having the extremely highly crosslinked network structure and having excellent heat resistance and therefore the thermal deformation of the thermoplastic resin of the microlens body 2 is prevented and the microlens having the high condensing power and high reliability is obtd.
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