| 摘要 |
PURPOSE:To improve environment resistance, by constituting a conducting path by an insulating hard carbon thin film, and using a part of the film as the current conducting path. CONSTITUTION:On an Si substrate 1, an insulating hard carbon thin film 2 is formed. Thereafter, CO2 laser light 4 is projected. The laser light 4 is converged by a lens 5 to about 10mum. The upper part of the film is scanned with power of about 2W. A scanned track 6 is annealed and changed into a conducting film. Thus a conducting path 3 is formed. In place of the laser light 4, high speed particles can be effectively used. Since the high-speed particles can be converged to 1mum or less in comparison with the laser light, the conducting path having a minute pattern can be formed. Thus, the hard thin-film conducting path characterized by no irregularities on the surface, simple direct writing and excellent environment resistance can be obtained. |
