| 摘要 |
PURPOSE:To contrive to miniaturize a heat treatment equipment by providing main heating means to heat treatment space from the outside of a treatment bath and auxiliary heating means provided within the main heating means. CONSTITUTION:A heat treatment equipment 1 is provided with a treatment bath 2 and the nearly cylindrical shape treatment bath 2 made of quartz glass and contains a jig 4 which holds plural wafers 3 to be treated aligned standing within a treatment space 5. An inlet 6 is provided at one end of the treatment bath 2 and the inlet 6 is closed with a plug 7 made of quartz glass inserted in the inlet 6. An exhaust port 12 is provided at the other end of the treatment bath 2 and an adiabatic member 13 filled with a sub-heater 9a around the exhaust port 12 is attached inside the treatment bath 2. The treatment space 5 is heated from outside by a main heater 14 and from both the ends, heated by sub-heaters 9 and 9a so required temperature conditions can be obtained near the ends of the treatment space 5. This enables to obtain a smaller heat treatment equipment which is able to treat uniformly. |
