Method of manufacturing parts for use to the heat processing furnace

摘要

A method of manufacturing extremely high purity parts for use to the heating furnace comprising adding a sintering assistant of 0.5-2.0 weight % and a binder, to SiC powder which has an average particle diameter of 2 mu m or less, and molding it to a predetermined form; applying the purification treatment to this molded body by placing it in the 800 DEG -1,300 DEG C. atmosphere of a gas which is selected from a group consisting of halogen gas and hydrogen halide; degassing the purified molded body in vacuum under a temperature higher than that employed at the purification treatment; sintering the degassed molded body, and coating an SiC film on at least part of the sintered body according to the chemical vapor deposition.