LIGHT IRRADIATING APPARATUS

摘要

PURPOSE:To make the difference in pressure between a reflector chamber and an exposure chamber exceed two figures by a method wherein the positions of rotary center, rotary bangle of a reflector and a fixed slit are arranged so that reflecting beams may pass through the fixed slit constantly regardless of the rotation of reflector. CONSTITUTION:Incident beams 2 reflected by a reflector 1 arranged inside a reflector chamber 6 advances along a reflecting optical path through a beam duct 7 and a slit 8 to irradiate the surface of an irradiated material 11 arranged in a exposure chamber 9. Next the reflector 1 forms a reflecting angle of 85 deg.-87 deg.; the distance from the rotary center 4 to the reflecting point on reflector 1 is kept at 229-382mm; a differential exhausting slit 8 is located on a point 2.8mm distant upstream and 19.806mm distant downward respectively from the rotary center 4. Finally the incident beam section of 100mmX10mum, the slit 8 opening of 100mmX24mum and the reflector surface of 160mmX100mm are respectively specified.