| 摘要 |
PURPOSE:To obtain the regenerated humidity sensitive element which indicates the stable characteristics even in a high humidity region, by continuously applying a high AC voltage, which is higher than the oxidation-reduction potential of metal or metal oxide, to the degraded humidity sensitive element. CONSTITUTION:In the case the humidity sensitive element is regnerated, the AC voltage, which is higher than the oxidation-reduction potential of the metal or metal oxide of the humidity sensitive element, is applied to said element in the region wherein the humidity sensitive element is not degraded by the generation of Joule heat. For example, when the electric resistance value corresponding to relative humidity is varied at the time a pulse voltage is applied in the high temperture, high humidity environment such as 80 deg.C and 90% RH under the no-voltage load condition, the resistance value is decreased due to the high humidity and the tendency of degradation is indicated. On the contrary, when the voltage load is applied, the resistance value is restored by the application of the AC voltage. Even though the operation is repeated, the humidity sensitive element is not degraded. In this method, polarization is completely suppressed by very slight power from 0.1mW to several tens of 10mW, and the humidity sensitive element, which indicates stable characteristics in the high humidity region, can be obtained. |
