摘要 |
PURPOSE:To permit a simple constitution of acoustic matching materials to function as a contact pressure sensor together with a distance sensor by providing a piezoelectric vibrator with the acoustic matching materials which are formed by a pressure sensitive, conductive rubber. CONSTITUTION:The main surface 5 of the piezoelectric vibrator 1 is provided with an acoustic matching layer 4 formed by a pressure sensitive, conductive rubber 6 which is equipped with an electrode 7 and its electrode 7 has an aperture 9 through which ultrasonic waves are passable freely, with the result that a distance can be measured by matched echo sounder ultrasonic waves through the piezoelectric vibrator 1. On the other hand, contact pressures are measured by reactions of the rubber 6 towards the contact pressures of the electrode 7. Thus the above simple constitution provides a composite sensor to function as the contact pressure sensor together with the distance sensor.
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