| 摘要 |
PURPOSE:To provide a device which can surely supply a reactive gas and high- frequency electric power with simple construction with respect to a device which forms a film by making use of electric discharge by connecting a holding electrode and cassette by conductive gaskets. CONSTITUTION:The upper and lower conductive gaskets 50A, 50B are respectively held in the grooves of the upper and lower inside peripheral walls of the holding electrode 60. The taper of the upper flange part 40A of the cassette 40 and the lower taper thereof contact respectively with the gaskets 50A, 50B when the cassette is inserted into the electrode 60. Both gaskets shrink on additional descending of the cassette 40 until the base of the cassette 40 arrives at the base of the electrode 60. The tightening force necessary for sealing the reactive gas is thereby obtd. An annular space 51 which serves as a gas chamber is formed at the same instant. A cylindrical base 45 is then electrically separated from the cassette 40 and the reactive gas is supplied into the space 51 and the cassette 40. The high-frequency electric power is supplied from a power source 30 via the electrode 60 and the gaskets 50A, 50B to the cassette 40, by which the film formation is executed.
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