| 摘要 |
PURPOSE:To enhance responsivity, reliability, and display quality by interposing a reduction color developing layer, an intermediate insulating layer contg. an alkali metal oxide, and an oxidation color developing layer between both electrodes to form an electrochromic element. CONSTITUTION:An ITO film 2 is formed as a transparent conductive film on a glass base 1 by the reactive ion plating method, an IrOx film 3 is deposited as the oxidation color developing layer on the film 2 by the reactive sputtering method, the intermediate insulating layer 4 is vapor deposited on the film 3 by the electron beam method using a pellet mixture of 10wt% Na2O and 90wt% Ta2O5 as an evaporation source, the reduction color developing layer 5 is vapor deposited on the layer 4 by the electron beam method using WO3 pellets as an evaporation source, and finally an ITO film 6 is formed by the reactive ion plating method in succession to prepare the whole solid-state electrochromic element.
|
