| 摘要 |
PURPOSE:To prevent the cracking of a hearth liner as well as to increase the irradiation efficiency of electron beams by keeping a base material to be vapor- deposited in an electrically grounded state while keeping it in a heat insulated state with the hearth liner. CONSTITUTION:A Co-Ni alloy is put on a hearth liner 1 as a base material 3 to be vapor-deposited. The base material 3 is electrically grounded through a filled metal 7 and a copper crucible 4. The base material 3 is heated by working an electron beam generator 20, and at the same time, a drum 10 is rotated at a constant speed. At this time, the hearth liner 1 is not negatively charged because the base material 3 is grounded. The Co-Ni alloy is melted by heating with electron beams, begins to evaporate from the surface, and deposits successively on a guided tape base 11 through a gap in a screen 30.
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