| 摘要 |
PURPOSE:To improve the functions including the acceleration of inspection speed by a method wherein, when appearance, shape or sticking dust of IC automatically carried to be inspected are automatically inspected, a CPU for exclusive inspection to be freely replacable is provided. CONSTITUTION:A data processor 1 composed of a carrier system 2 and an independent inspection unit 3 closely adjoining the carrier system 2 is to be operated as follows. Firstly the carrier system 2 is started by manipulating an operation panel 4 and then the LSI chips 1A stocked in a tray stocker 5 are taken out one by one to be mounted on a turntable 8 by turning a head 6 holding each LSI chip 1A. Secondly the table 8 once turned to shift the chip 1A to a positioning unit 9 for automatic positioning is further turned to the detector unit 3 for detecting the chip 1A which is shifted to an index unit 10 to be discharged from a discharge unit 12 if it is defective. In such a constitution, the inspection unit 3 composed of an ITV camera 13 and a CPU can convert any image signals picked up by the camera 13 into binary to be inspected by the CPU. |
