| 发明名称 |
VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERSUBSTRATS |
| 摘要 |
A method of manufacturing a semiconductor substrate includes the steps of performing flame electrolysis on a galss source with an oxyhydrogen flame, spray-depositing the resultant glass particles on a joint surface of a semiconductor substrate, placing another semiconductor substrate on the deposited glass particles and performing heat-treatment, and joining the two substrates by sintering the glass particles. |
| 申请公布号 |
DE3613215(A1) |
申请公布日期 |
1986.10.23 |
| 申请号 |
DE19863613215 |
申请日期 |
1986.04.18 |
| 申请人 |
NIPPON TELEGRAPH AND TELEPHONE CORP. |
发明人 |
SAWADA,RENSHI;WATANABE,JUNJI |
| 分类号 |
H01L25/00;H01L21/02;H01L21/20;H01L21/316;H01L21/762;H01L27/12;(IPC1-7):H01L21/20 |
主分类号 |
H01L25/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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