发明名称 OPTICAL MEASURING INSTRUMENT
摘要 An optical instrument which has a parallel scanning beam generator including a polygonal rotary mirror adpated to reflect an incident beam from a beam generator and obtain a rotary scanning beam, and a f theta lens adapted to turn the rotary scanning beam into a parallel scanning beam, and a light-receiving element for detecting the brightness and darkness of the parallel scanning beam passed through an object to be measured, and which is adapted to detect the time length of a dark or bright portion occurring when a part of the parallel scanning beam is intercepted by the object to be measured, which is disposed between the parallel scanning beam generator and the light-receiving element, and thereby determine the measurement of the object with respect to the scanning direction, a variable lens system which has a focus on an optical path between the beam generator and polygonal rotary mirror being provided on the same optical path.
申请公布号 WO8606159(A1) 申请公布日期 1986.10.23
申请号 WO1986JP00175 申请日期 1986.04.09
申请人 MITUTOYO MFG. CO., LTD. 发明人 KUWABARA, YOSHIHARU;NAKAMURA, TAIZO
分类号 G01B11/02;(IPC1-7):G01B11/02;G01B11/08 主分类号 G01B11/02
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