| 摘要 |
PURPOSE:To obtain a porous diaphragm capable of freely selecting the size and shape of a fine pore and used in the separation of gas, by forming a microporous membrane with a fine pore size of 10-500Angstrom to the surface of a porous body with a fine pore size of 0.1-10mum by a chemical vapor deposition method. CONSTITUTION:A porous ceramic filter pipe before perfect sintering having a relatively large fine pore size (0.1-10mum) comprising expanded silica, sintered alumina or mullite is used as a base material. Al2O3, ZrO2 or SiO2 is adhered to the surface of said base material by a chemical vapor deposition method to obtain a porous diaphragm with a smaller fine pore size (10-500Angstrom ). Particles 2 with a particle size of about 0.1mum are grown on the surface of the porous body 1 or in fine pores 1'. |
