发明名称 |
COATING INSULATING MATERIALS BY GLOW DISCHARGE |
摘要 |
Coatings of hard carbon, silicon, or germanium are applied to electrically insulating materials in a D.C. glow discharge chamber. Initiation and maintenance of a glow discharge is ensured by using a cathode of larger area than the material to be coated. For example the cathode may be twice the diameter of the material to be coated. Materials capable of being coated include zinc sulphide, zinc selenide, silica, and glass. The gases used are hydrocarbon e.g. butane, methane, etc. for carbon coatings; silane for silicon coatings; and germane for germanium coatings. |
申请公布号 |
DE3175345(D1) |
申请公布日期 |
1986.10.23 |
申请号 |
DE19813175345 |
申请日期 |
1981.07.21 |
申请人 |
NATIONAL RESEARCH DEVELOPMENT CORPORATION |
发明人 |
GREEN, GEOFFREY WILLIAM;LETTINGTON, ALAN HAROLD |
分类号 |
C23C16/50;C23C16/22;C23C16/26;C23C16/27;C23C16/503;(IPC1-7):C23C14/38 |
主分类号 |
C23C16/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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