| 摘要 |
PURPOSE:To suppress the temperature of heating by a heater low and improve safety by a method wherein a quartz container is made of high purity opaque quartz and formed into a cylinder with a bottom. CONSTITUTION:A quartz container 3 is made of high purity opaque quartz and formed into a cylinder with a bottom. By forming the quartz container 3 like this, unlike square containers, no corner part exists and unevenness of the distribution of the concentration of the vapor of isopropyl alcohol (IPA) 2 due to heat radiation from the corner part is not caused. As heat condition to IPA 2 is uniform, the temperature of heating by a heater can be suppressed lower than the temperature in the case of the square container. Therefore, safety of a vapor drying and cleaning apparatus is further improved. |
