| 摘要 |
PURPOSE:To eliminate a resonance mode of a higher order following a structual resonance, and to execute positioning with a high accuracy by constituting the title device so that an optical axis of a detecting optical system and a driving axis of a driving system become coaxial substantially. CONSTITUTION:A laser beam which has been emitted from a laser beam source 18 travels through linear holes 11a, 12a and 13a on a driving axis from the back of a motor 10 through an interferometer 16, it is reflected by a reflection mirror 15 of the inside of a slider 14 and returned to its original path, photodetected by a receiver 17 through the interferometer 16, detects a position of the slider 14 and its positioning is executed. In this case, an optical path of the laser beam for detecting the position and the driving axis core of the slider 14 are made coaxial substantially, therefore, a resonance mode of a higher order following a structural resonance is eliminated. In this way, positioning can be executed with a high accuracy.
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