发明名称 SAMPLE ADJUSTOR USED FOR FAULT ANALYSIS OF SEMICONDUCTOR OR THE LIKE
摘要 PURPOSE:To elevate the sample processing capacity, by pouring a dissolving liquid to a sample on a glass plate with a pipe extending upward from the side of a storage tank while having a discharge port at the tip thereof. CONSTITUTION:The whole of an apparatus is put into a breaker 9, which is placed on a hot plate with magnetic stirrer. After a storage tank 1 is filled with a dissolving liquid, a sample 6 is put on a glass plate 5, the solution is heated and then, the apparatus is rotated with a magnetic rotor 7. The dissolving liquid is sucked through a hole 3 by a centrifugal force with the rotation of the apparatus, ascending through a pipe 2 and falls from a discharge port 4, pouring onto the sample 6 ceaselessly. Thus, the resin attached to a semiconductor is dissolved away gradually by the dissolving liquid heated thereby elevating the sample processing capacity.
申请公布号 JPS61237070(A) 申请公布日期 1986.10.22
申请号 JP19850078112 申请日期 1985.04.12
申请人 MATSUSHITA ELECTRIC WORKS LTD 发明人 MAKINO ATSUSHI
分类号 G01R31/26;H01L21/56;H01L21/66 主分类号 G01R31/26
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