| 摘要 |
PURPOSE:To obtain a color image which has neither image distortion nor a color shift by oscillating light beams of the three primary colors fast in an X direction, deflecting the respective light beams in a Y direction by a common deflecting means, and putting those beams of the primary colors together into one light beam. CONSTITUTION:A red light source 1, a green light source 2, and a blue light source 3 are arranged to emit the light beams of the primary colors. The light beam from the red light source 1 is incident on an acoustooptic element 6 through an expander 4 and a right-angled prism 5 to scan a sample surface in the X direction. The light beam deflected by the acoustooptic element 6 strikes on an oscillatory mirror 13 through relay lenses 7 and 8, etc., and the 1st and the 2nd dichroic mirrors 11 and 12. The oscillatory mirror 13 is used in common among the respective color beams, which are polarized in the Y direction and converged an objective 16, etc., into a fine spot to scan a sample 17. Reflected light from the sample 17 passes said path reversely and is reflected by the 1st prism 9 to enter the 1st linear image sensor 19. Light beams of green and blue are incident on the 2nd and the 3rd image sensors 30 and 41 through similar baths.
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