| 摘要 |
PURPOSE:To make possible to simply attain a precise alignment after prealignment, by providing a stage device for moving a member holding a base plate, in the directions X, Y and a rotating direction, respectively. CONSTITUTION:One end of parallel leaf springs 2a, 2b is secured to a device body 1, and the other end of the parallel leaf spring 2a, 2b is secured with a first coupling member 3. Accordingly, the coupling member 3 moves in the direction X relative to the device body 1. Further, one end of parallel leaf springs 4a, 4b is secured to the coupling member 3, and the other end of the parallel leaf springs 4a, 4b is secured with a second coupling member 5. Accordingly, the coupling member 5 moves in the direction Y relative to the device body 1. Further, a wafer table 6 which may rotates in a plane defined by the directions X, Y relative to the first coupling member 5, is provided on the coupling member 5. |
